1,2-Naphthoquinone-2-diazido-5-sulfonyl Chloride • CAS 3770-97-6
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1,2-Naphthoquinone-2-diazido-5-sulfonyl Chloride – CAS 3770-97-6
1,2-Naphthoquinone-2-diazido-5-sulfonyl Chloride
CAS Number
3770-97-6
Category
Electronic chemicals
Molecular Formula
C10H5ClN2O3S
Molecular Weight
268.68
Chemical Class
Photoresist intermediate
Synonyms
DNQ-5-SC,1,2-Naphthoquinonediazide-5-sulfonyl chloride
Description
DNQ-5-SC is a naphthoquinonediazide-based photoactive compound used in positive photoresist systems for semiconductor, microelectronics, and display-related processing. In UV imaging workflows, it helps drive the solubility shift needed for fine-pattern development during photolithographic processing.
Applications
- Positive photoresist formulation programs
- Semiconductor and microelectronics process chemistry
- Photolithography and display-panel patterning workflows
Specifications
Description
Yellow to red crystal powder
Identification by IR
The IR spectra should comply with structure of 1,2-Naphthoquinone-2-diazido-5-sulfonyl Chloride
Loss on Drying
NMT 0.1%
Chromatographic Purity by HPLC
NLT 99.0%
Any Other Individual Impurity by HPLC
NMT 0.5%
Total Impurity by HPLC
NMT 1.0%
Handling & Supply Details
Storage Conditions
Store in a cool, dry place away from light, tightly sealed and refrigerated where possible — sensitive to heat and UV exposure.
Packaging
5 kg / 25 kg fiber drum with inner liner
Shelf Life
12 months